Tekinoloje yopaka vacuum

Ukadaulo wopaka utoto wa vacuum, womwe umadziwikanso kuti ukadaulo wamafilimu opyapyala, umagwiritsidwa ntchito m'mafakitale osiyanasiyana, monga zopangira zosungira zatsopano m'makampani azakudya, mafilimu oteteza kuwononga dzimbiri, kupanga ma cell a solar, zokutira zokongoletsa kwa zida za bafa ndi zodzikongoletsera. , kutchula ochepa.

Msika wa zida za vacuum coating wagawika pamaziko a ntchito, ukadaulo, ndi dera.Pankhani yaukadaulo, msika umagawikanso kukhala chemical vapor deposition (CVD), vapor deposition (kupatula kupopera), ndi sputtering.

Gawo loyikapo nthunzi limagawidwa kukhala evaporation ndi ena (pulsed laser, arc laser, etc.).Gawo la evaporation likuyembekezeka kuwonetsa kukulirakulira kwa nthawi ya kafukufuku chifukwa chakukula kwamakampani a semiconductor.

Pansi pa sputtering, msika wagawika mu zotakasika sputtering, magnetron sputtering (RF magnetron sputtering, etc. (pulsed DC, HPIMS, DC, etc.)) ndi ena (RF diode, ion matabwa, etc.).

Munda wa magnetron sputtering ukukula pang'onopang'ono, motsogozedwa ndi machitidwe abwino okhudzana ndi mafakitale opanga ndi zamagetsi.

Pankhani yakugwiritsa ntchito, msika wagawika m'mapulogalamu a CVD, mapulogalamu a PVD, ndi kugwiritsa ntchito sputtering.Pansi pa kugwiritsa ntchito PVD, msika umagawikanso m'zida zamankhwala, ma microelectronics, zida zodulira, zosungira, mphamvu zadzuwa, ndi zina.Gawo losungirako likuyembekezeka kuchitira umboni kukula kwakukulu panthawi yowunikira chifukwa cha kufunikira kosungirako komanso kutchuka kwa ma SSD.

Ntchito zina za PVD zikuphatikiza zinthu zakuthambo, zida zamagalimoto, kuyika, ndi zina zambiri.

Pansi pakugwiritsa ntchito sputtering, msika wagawika m'makanema maginito, masensa a gasi, zitsulo zamagetsi zamagetsi zamagetsi ndi zonyamula ma chip, makanema osamva dzimbiri, makanema otsutsa, zida zosungira, ndi zina zambiri.

Pansi pa ntchito ya CVD, msika wagawika ma polima, makina ophatikizika (IC) ndi zida za photovoltaic, ndi zida zachitsulo (zosungirako gasi, kutsatsa, kusungirako ndi kuyeretsa, kumva gasi ndi ma dielectric otsika k, catalysis, ndi zina). .