Kupaka kwa sputtering Pamene tinthu tambiri tambiri tambiri timaphulitsa cholimba pamwamba, tinthu tating'onoting'ono tolimba timatha kupeza mphamvu ndikuthawa pamwamba kuti tiyike pa gawo lapansi.Chodabwitsa cha sputtering chidayamba kugwiritsidwa ntchito muukadaulo wakuphimba mu 1870, ndipo pang'onopang'ono chimagwiritsidwa ntchito popanga mafakitale pambuyo pa 1930 chifukwa cha kuchuluka kwa ma deposition.Zipangizo zomwe zimagwiritsidwa ntchito kwambiri pamitengo iwiri zikuwonetsedwa pa Chithunzi 3 [Schematic diagram of two vacuum coating pole sputtering].Kawirikawiri zinthu zomwe zimayikidwa zimapangidwira mbale-chandamale, chomwe chimakhazikika pa cathode.Gawo lapansi limayikidwa pa anode moyang'anizana ndi chandamale, ma centimita angapo kutali ndi chandamale.Dongosolo likakankhidwira ku vacuum yayikulu, limadzazidwa ndi 10 ~ 1 Pa gasi (nthawi zambiri argon), ndipo voteji ya ma volt zikwi zingapo imagwiritsidwa ntchito pakati pa cathode ndi anode, ndipo kutulutsa kowala kumapangidwa pakati pa maelekitirodi awiri. .Ma ions abwino omwe amapangidwa ndi kukhetsa amawulukira ku cathode pansi pakuchita kwa gawo lamagetsi ndikuwombana ndi ma atomu omwe ali pamtunda.Ma atomu omwe amatuluka pa chandamale chifukwa cha kugundako amatchedwa maatomu ophulika, ndipo mphamvu zawo zimakhala mu 1 mpaka makumi a ma volts a electron.Ma atomu otayidwa amayikidwa pamwamba pa gawo lapansi kuti apange filimu.Mosiyana ndi ❖ kuyanika kwa evaporation, sputter ❖ kuyanika sikumangokhala ndi malo osungunuka a filimuyo, ndipo amatha kutaya zinthu zowonongeka monga W, Ta, C, Mo, WC, TiC, ndi zina zotero. njira, ndiko kuti, zotakasika mpweya (O, N, HS, CH, etc.) ndi
anawonjezera ku Ar gasi, ndi zotakasika mpweya ndi ayoni amachita ndi chandamale atomu kapena sputtered atomu kupanga pawiri (monga okusayidi, nayitrogeni) Compounds, etc.) ndi kuikidwa pa gawo lapansi.Njira yowonongeka kwambiri ingagwiritsidwe ntchito kuyika filimu yotetezera.Gawo lapansi limayikidwa pa electrode yokhazikika, ndipo chandamale cha insulating chimayikidwa pa electrode yosiyana.Mapeto amodzi amagetsi othamanga kwambiri amakhazikika, ndipo mbali imodzi imalumikizidwa ndi electrode yokhala ndi chandamale cha insulating kudzera pa netiweki yofananira ndi DC blocking capacitor.Pambuyo poyatsa magetsi othamanga kwambiri, magetsi othamanga kwambiri amasintha mosalekeza polarity.Ma electron ndi ma ion abwino mu plasma amagunda chandamale yotsekera panthawi yozungulira theka ndi theka loyipa la voteji, motsatana.Popeza kusuntha kwa ma elekitironi ndikwambiri kuposa kwa ma ion abwino, pamwamba pa chandamale cha insulating ndi cholakwika.Pamene mgwirizano wosunthika ufikira, chandamalecho chimakhala pachokondera choyipa, kotero kuti ma ions abwino omwe amatuluka pa chandamale amapitilirabe.Kugwiritsa ntchito magnetron sputtering kumatha kuonjezera mlingo wa deposition ndi pafupifupi dongosolo la ukulu poyerekeza ndi non-magnetron sputtering.
Nthawi yotumiza: Jul-31-2021